TSUPREM-4 : Akio KITAGAWA

CMOS structure analysis

TSUPREM4入力ファイルの説明

記述例	説明
$ TMA TSUPREM-4 p-well CMOS process input file $ $ $ 2D structure plot commands after 8th Process Module $ $ OPTION DEVICE=X INITIALIZE IN.FILE=str0 $ Plot the initial mesh SELECT TITLE="Initial Mesh" PLOT.2D GRID Y.MIN=-3.0 INITIALIZE IN.FILE=str1-1 $ P-well implant profile SELECT TITLE="P-well implant" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=22 COLOR=3 FOREACH X (16 TO 22 STEP 1) CONTOUR VALUE=X LINE.TYPE=2 COLOR=2 END COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str1-2 $ P-well doping profile and structure SELECT TITLE="P-welll Doping" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=22 COLOR=3 FOREACH X (16 TO 22 STEP 1) CONTOUR VALUE=X LINE.TYPE=2 COLOR=2 END COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str2 $ Active Pattern and p+ Field implant structure SELECT TITLE="Active Pattern and p+ Field Implant" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 FOREACH X (16 TO 22 STEP 1) CONTOUR VALUE=X LINE.TYPE=2 COLOR=2 END COLOR OXIDE COLOR=4 COLOR NITRIDE COLOR=2 PLOT.2D ^AX ^CL $ Active Pattern and p+/n+ Field implant structure SELECT TITLE="Active Pattern and p+/n+ Field Implant" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR OXIDE COLOR=4 COLOR NITRIDE COLOR=2 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str3 $ P-well doping profile and LOCOS structure 2 SELECT TITLE="LOCOS 2" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL $ Plot inpurity profiles SELECT Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of n-ch MOSFET" PLOT.1D X.VALUE=-4.5 COLOR=2 RIGHT=2.0 BOTTOM=12 SELECT Z=LOG10(PHOS) PLOT.1D X.VALUE=-4.5 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D X.VALUE=-4.5 COLOR=1 ^AX ^CL $ Plot inpurity profiles SELECT Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of p-ch MOSFET" PLOT.1D X.VALUE=4.5 COLOR=2 RIGHT=2.0 BOTTOM=12 SELECT Z=LOG10(PHOS) PLOT.1D X.VALUE=4.5 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D X.VALUE=4.5 COLOR=1 ^AX ^CL INITIALIZE IN.FILE=str4 $ Poly-Si gate structure SELECT TITLE="Poly-Si Gate" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=23 COLOR=7 SELECT Z=LOG10(PHOSPHORUS) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str5 $ n-ch S/D LDD implant structure SELECT TITLE="n-ch LDD" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str6 $ p-ch S/D LDD implant structure SELECT TITLE="p-ch LDD" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str7 $ side wall structure SELECT TITLE="Side Wall" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str8 $ S/D implant structure SELECT TITLE="S/D Implantation" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS+ARSENIC) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=str9 $ Contact hole structure SELECT TITLE="Contact Hale" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS+ARSENIC) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 PLOT.2D ^AX ^CL INITIALIZE IN.FILE=strA $ Final structure SELECT TITLE="Final Structure" PLOT.2D BOUNDARY Y.MIN=-3.0 SELECT Z=LOG10(BORON) COLOR MIN.V=16 MAX.V=16.9 COLOR=3 COLOR MIN.V=16.9 MAX.V=22 COLOR=7 SELECT Z=LOG10(PHOSPHORUS+ARSENIC) COLOR MIN.V=16.7 MAX.V=22 COLOR=5 COLOR POLYSILI COLOR=6 COLOR OXIDE COLOR=4 COLOR ALUMINUM COLOR=9 PLOT.2D ^AX ^CL $ Profile of n-ch MOSFET $ Plot inpurity profiles SELECT Z=LOG10(BORON) TITLE="Impurity Profile under the S/D of n-ch MOSFET" PLOT.1D X.VALUE=-3.0 COLOR=2 RIGHT=2.0 BOTTOM=12 SELECT Z=LOG10(PHOS+ARSENIC) PLOT.1D X.VALUE=-3.0 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D X.VALUE=-3.0 COLOR=1 ^AX ^CL $ Plot inpurity profiles SELECT Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of n-ch MOSFET" PLOT.1D X.VALUE=-4.5 COLOR=2 RIGHT=2.0 BOTTOM=12 SELECT Z=LOG10(PHOS+ARSENIC) PLOT.1D X.VALUE=-4.5 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D X.VALUE=-4.5 COLOR=1 ^AX ^CL $ Plot inpurity profiles SELECT Z=LOG10(BORON) + TITLE="Impurity Profile in the channel of n-ch MOSFET" PLOT.1D Y.VALUE=0.07 COLOR=2 BOTTOM=12 LEFT=-7.0 RIGHT=-2.0 SELECT Z=LOG10(PHOS+ARSENIC) PLOT.1D Y.VALUE=0.07 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D Y.VALUE=0.07 COLOR=1 ^AX ^CL $ Profile of p-ch MOSFET $ Plot inpurity profiles SELECT Z=LOG10(BORON) TITLE="Impurity Profile under the S/D of p-ch MOSFET" PLOT.1D X.VALUE=3.0 COLOR=2 RIGHT=2.0 BOTTOM=12 SELECT Z=LOG10(PHOS+ARSENIC) PLOT.1D X.VALUE=3.0 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D X.VALUE=3.0 COLOR=1 ^AX ^CL $ Plot inpurity profiles SELECT Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of p-ch MOSFET" PLOT.1D X.VALUE=4.5 COLOR=2 RIGHT=2.0 BOTTOM=12 SELECT Z=LOG10(PHOS+ARSENIC) PLOT.1D X.VALUE=4.5 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D X.VALUE=4.5 COLOR=1 ^AX ^CL $ Plot inpurity profiles SELECT Z=LOG10(BORON) + TITLE="Impurity Profile in the channel of p-ch MOSFET" PLOT.1D Y.VALUE=0.07 COLOR=2 BOTTOM=12 LEFT=2.0 RIGHT=7.6 SELECT Z=LOG10(PHOS+ARSENIC) PLOT.1D Y.VALUE=0.07 COLOR=4 ^AX ^CL SELECT Z=LOG10(DOPING) PLOT.1D Y.VALUE=0.07 COLOR=1 ^AX ^CL $ Print layer data of n-ch MOSFET SELECT Z=LOG10(BORON) TITLE="n-ch MOSFET" PRINT.1D X.VALUE=-4.5 LAYER SELECT Z=LOG10(PHOS+ARSENIC) PRINT.1D X.VALUE=-4.5 LAYER $ Print layer data of p-ch MOSFET SELECT Z=LOG10(BORON) TITLE="p-ch MOSFET" PRINT.1D X.VALUE=4.5 LAYER SELECT Z=LOG10(PHOS+ARSENIC) PRINT.1D X.VALUE=4.5 LAYER

記述例

説明

$ TMA TSUPREM-4 p-well CMOS process input file 
$
$
$ 2D structure plot commands after 8th Process Module
$
$

OPTION DEVICE=X

INITIALIZE IN.FILE=str0

$ Plot the initial mesh
SELECT     TITLE="Initial Mesh"
PLOT.2D    GRID Y.MIN=-3.0

INITIALIZE IN.FILE=str1-1

$ P-well implant profile
SELECT     TITLE="P-well implant"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=22 COLOR=3
FOREACH  X (16 TO 22 STEP 1)
    CONTOUR    VALUE=X LINE.TYPE=2 COLOR=2
END
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE IN.FILE=str1-2

$ P-well doping profile and structure
SELECT     TITLE="P-welll Doping"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=22 COLOR=3
FOREACH  X (16 TO 22 STEP 1)
    CONTOUR    VALUE=X LINE.TYPE=2 COLOR=2
END
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE IN.FILE=str2

$ Active Pattern and p+ Field implant structure
SELECT     TITLE="Active Pattern and p+ Field Implant"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
FOREACH  X (16 TO 22 STEP 1)
    CONTOUR    VALUE=X LINE.TYPE=2 COLOR=2
END
COLOR      OXIDE COLOR=4
COLOR      NITRIDE COLOR=2
PLOT.2D    ^AX ^CL

$ Active Pattern and p+/n+ Field implant structure
SELECT     TITLE="Active Pattern and p+/n+ Field Implant"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      OXIDE COLOR=4
COLOR      NITRIDE COLOR=2
PLOT.2D    ^AX ^CL

INITIALIZE IN.FILE=str3

$ P-well doping profile and LOCOS structure 2
SELECT     TITLE="LOCOS 2"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of n-ch MOSFET"
PLOT.1D    X.VALUE=-4.5 COLOR=2 RIGHT=2.0 BOTTOM=12
SELECT     Z=LOG10(PHOS)
PLOT.1D    X.VALUE=-4.5 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    X.VALUE=-4.5 COLOR=1 ^AX ^CL

$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of p-ch MOSFET"
PLOT.1D    X.VALUE=4.5 COLOR=2 RIGHT=2.0 BOTTOM=12
SELECT     Z=LOG10(PHOS)
PLOT.1D    X.VALUE=4.5 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    X.VALUE=4.5 COLOR=1 ^AX ^CL

INITIALIZE IN.FILE=str4

$ Poly-Si gate structure
SELECT     TITLE="Poly-Si Gate"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=23 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE IN.FILE=str5

$ n-ch S/D LDD implant structure
SELECT     TITLE="n-ch LDD"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE IN.FILE=str6

$ p-ch S/D LDD implant structure
SELECT     TITLE="p-ch LDD"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE IN.FILE=str7

$ side wall structure
SELECT     TITLE="Side Wall"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE    IN.FILE=str8

$ S/D implant structure
SELECT     TITLE="S/D Implantation"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS+ARSENIC)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE    IN.FILE=str9

$ Contact hole structure
SELECT     TITLE="Contact Hale"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS+ARSENIC)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
PLOT.2D    ^AX ^CL

INITIALIZE    IN.FILE=strA

$ Final structure
SELECT     TITLE="Final Structure"
PLOT.2D    BOUNDARY Y.MIN=-3.0
SELECT     Z=LOG10(BORON)
COLOR      MIN.V=16 MAX.V=16.9 COLOR=3
COLOR      MIN.V=16.9 MAX.V=22 COLOR=7
SELECT     Z=LOG10(PHOSPHORUS+ARSENIC)
COLOR      MIN.V=16.7 MAX.V=22 COLOR=5
COLOR      POLYSILI COLOR=6
COLOR      OXIDE COLOR=4
COLOR      ALUMINUM COLOR=9
PLOT.2D    ^AX ^CL

$ Profile of n-ch MOSFET
$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) TITLE="Impurity Profile under the S/D of n-ch MOSFET"
PLOT.1D    X.VALUE=-3.0 COLOR=2 RIGHT=2.0 BOTTOM=12
SELECT     Z=LOG10(PHOS+ARSENIC)
PLOT.1D    X.VALUE=-3.0 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    X.VALUE=-3.0 COLOR=1 ^AX ^CL

$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of n-ch MOSFET"
PLOT.1D    X.VALUE=-4.5 COLOR=2 RIGHT=2.0 BOTTOM=12
SELECT     Z=LOG10(PHOS+ARSENIC)
PLOT.1D    X.VALUE=-4.5 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    X.VALUE=-4.5 COLOR=1 ^AX ^CL

$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) +
           TITLE="Impurity Profile in the channel of n-ch MOSFET"
PLOT.1D    Y.VALUE=0.07 COLOR=2 BOTTOM=12 LEFT=-7.0 RIGHT=-2.0
SELECT     Z=LOG10(PHOS+ARSENIC)
PLOT.1D    Y.VALUE=0.07 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    Y.VALUE=0.07 COLOR=1 ^AX ^CL

$ Profile of p-ch MOSFET
$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) TITLE="Impurity Profile under the S/D of p-ch MOSFET"
PLOT.1D    X.VALUE=3.0 COLOR=2 RIGHT=2.0 BOTTOM=12
SELECT     Z=LOG10(PHOS+ARSENIC)
PLOT.1D    X.VALUE=3.0 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    X.VALUE=3.0 COLOR=1 ^AX ^CL

$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) TITLE="Impurity Profile under the Gate of p-ch MOSFET"
PLOT.1D    X.VALUE=4.5 COLOR=2 RIGHT=2.0 BOTTOM=12
SELECT     Z=LOG10(PHOS+ARSENIC)
PLOT.1D    X.VALUE=4.5 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    X.VALUE=4.5 COLOR=1 ^AX ^CL

$ Plot inpurity profiles
SELECT     Z=LOG10(BORON) +
           TITLE="Impurity Profile in the channel of p-ch MOSFET"
PLOT.1D    Y.VALUE=0.07 COLOR=2 BOTTOM=12 LEFT=2.0 RIGHT=7.6
SELECT     Z=LOG10(PHOS+ARSENIC)
PLOT.1D    Y.VALUE=0.07 COLOR=4 ^AX ^CL
SELECT     Z=LOG10(DOPING)
PLOT.1D    Y.VALUE=0.07 COLOR=1 ^AX ^CL


$ Print layer data of n-ch MOSFET
SELECT     Z=LOG10(BORON) TITLE="n-ch MOSFET"
PRINT.1D   X.VALUE=-4.5 LAYER
SELECT     Z=LOG10(PHOS+ARSENIC)
PRINT.1D   X.VALUE=-4.5 LAYER

$ Print layer data of p-ch MOSFET
SELECT     Z=LOG10(BORON) TITLE="p-ch MOSFET"
PRINT.1D   X.VALUE=4.5 LAYER
SELECT     Z=LOG10(PHOS+ARSENIC)
PRINT.1D   X.VALUE=4.5 LAYER

Updated: